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New Focused Ion Beam, Scanning Electron Microscope for the WVU Shared Research Facilities

A Zeiss Crossbeam 550L focused ion beam - scanning electron microscope (FIB-SEM) has been ordered by the WVU SRF. The brand new system will be housed in the Electron Microscopy Facilities at the Engineering Science Building. The order follows a thorough evaluation process by a technical committee composed of representative faculty and researchers at WVU. Various candidate systems from renowned manufacturers were evaluated and the Zeiss system was determined to be the most suitable. Given manufacturing lead times and special site requirements, the new FIB-SEM is expected to be available to researchers by Summer 2025. It will find widespread applications in metallurgy, ceramics, composites, polymers, geology, arts, biology, pharmaceuticals, forensics, and other disciplines.
Zeiss SEM with Geminin 2 column

The ZEISS Crossbeam 550L is a large chamber FIB-SEM workstation that provides exceptional e-beam imaging and FIB performance. The system chamber and stage are designed to accommodate up to 200 mm sized samples.  The Crossbeam delivers sub-nm SEM imaging resolution, ultra-thin TEM samples for TEM characterization, and best in class 3D reconstruction results. The new system also boasts advanced chemical and crystallographic analyses capabilities with state-of-the-art Oxford  Energy Dispersive Spectroscopy (EDS) and Electron Backscatter Diffraction Spectroscopy (EBSD) detectors and microanalysis system. 
 
The new equipment was made possible due to a $2.5M federal financial assistance award (Federal Award ID No. 60NANB23D170) through the US Department of Commerce.