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CRF Rates

WVU User Rates Higher Education Institution User Rates Government and Private Sector User Rates

Cleanroom Facilities'
WVU User Rates

Current Internal WVU Rates are based on FY17 and include price forecasts for planning your research budgets. Check the list for "CRF" to see prices related to Cleanroom Facilities usage.

Cleanroom Facilities'
Higher Education User Rates

Instrument Instrument Type Price per hour unless noted
User Assistance instrument assistance $43
C and Rf Sputtering Station (class 10,000) deposition $165/day to access all CRF instruments
Neocera Pulsed Laser Deposition
(class 10,000)
deposition $165/day to access all CRF instruments
Temescal BJD E-Beam Evaporator
(class 10,000)
deposition $165/day to access all CRF instruments
CVC 610 DC Magnetron Sputtering Station
(class 10,000)
deposition $165/day to access all CRF instruments
DISCOTECH DAD-3240 Dicing Saw (entry lab) dicing $53
Trion Technology Minilock III Reactive Ion Etching with Inductively Coupled Plasma
(class 10,000)
etching/cleaning $165/day to access all CRF instruments
March PX-250 Plasma Asher
(class 1,000)
etching/cleaning $165/day to access all CRF instruments
Tencor Alpha-Step 200 stylus profilometer
(class 1,000)
inspection/packaging $165/day to access all CRF instruments
MEIJI MT7000 Optical Microscope
(class 1,000)
inspection/packaging $165/day to access all CRF instruments
Olympus BH-2 UMA Optical Microscope
(class 1,000)
inspection/packaging $165/day to access all CRF instruments
JEOL JSM-7600F Scanning Electron Microscope
(class 1,000)
lithography-e-beam $165/day to access all CRF instruments
West Bond 74776E Gold Wire Bonder (class10,000) packaging $165/day to access all CRF instruments
(class 1,000 room) patterning $165/day to access all CRF instruments
Suss Microtech MA6 Mask Aligner
(class 100 room)
patterning $165/day to access all CRF instruments
OAI UV Flood Exposure
(class 100)
patterning $165/day to access all CRF instruments
Bruker Contour GT K0 Optical Profiler profiler-optical $165/day to access all CRF instruments
(class 1,000) spinner $165/day to access all CRF instruments
Laurel Technologies 400 Spinners
(class 100)
spinner $165/day to access all CRF instruments
AnnealSys A S-Micro Rapid Thermal Annealer (class 10,000) thermal processing $165/day to access all CRF instruments
Lindberg Blue M Tube Oxidation Furnace (class 10,000) thermal processing $165/day to access all CRF instruments

CleanRoom Facilities'
Government or Private Sector User Rates

Instrument Instrument Type Price/Hr (unless otherwise noted)
User Assistance Fee instrument assistance $65
AnnealSys A S-Micro Rapid Thermal Annealer (class 10,000) thermal processing $329/day
to access all CRF instruments
Bruker Contour GT K0 Optical Profiler profiler-optical $329/day
to access all CRF instruments
CVC 610 DC Magnetron Sputtering Station (class 10,000) deposition $329/day
to access all CRF instruments
DC and Rf Sputtering Station (class 10,000) deposition $329/day
to access all CRF instruments
DISCOTECH DAD-3240 Dicing Saw (entry lab) dicing $95
to access all CRF instruments
JEOL JSM-7600F Scanning Electron Microscope (class 10,000) lithography-e-beam $329/day
to access all CRF instruments
Laurel Technologies 400 Spinners (class 100) spinner $329/day
to access all CRF instruments
Laurel Technologies 600 Spinner (class 1,000) spinner $329/day
to access all CRF instruments
Lindberg Blue M Tube Oxidation Furnace (class 10,000) thermal processing $329/day
to access all CRF instruments
March PX-250 Plasma Asher (class 1,000) etching/cleaning $329/day
to access all CRF instruments
MEIJI MT7000 Optical Microscope (class 1,000) inspection/packaging $329/day
to access all CRF instruments
Neocera Pulsed Laser Deposition (class 10,000) deposition $329/day
to access all CRF instruments
OAI UV Flood Exposure (class 100) patterning $329/day
to access all CRF instruments
Olympus BH-2 UMA Optical Microscope (class 1,000) inspection/packaging $329/day
to access all CRF instruments
Suss Microtech MA6 Mask Aligner (class 100 room) patterning $329/day
to access all CRF instruments
Suss Microtech MJB3 Mask Aligner (class 1,000 room) patterning $329/day
to access all CRF instruments
Temescal BJD E-Beam Evaporator (class 10,000) deposition $329/day
to access all CRF instruments
Tencor Alpha-Step 200 stylus profilometer (class 10,000) inspection/packaging $329/day
to access all CRF instruments
Thermolyne 6000 Programmable Furnace (class 1,000) thermal processing $329/day
to access all CRF instruments
Trion Technology Minilock III Reactive Ion Etching with Inductively Coupled Plasma (class 10,000) etching/cleaning $329/day
to access all CRF instruments
West Bond 74776E Gold Wire Bonder (class10,000) packaging $329/day
to access all CRF instruments