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CRF Rates

WVU User Rates Higher Education Institution User Rates Government and Private Sector User Rates

Cleanroom Facilities'
WVU User Rates

UPDATE COMING SOON--per-instrument hourly rates now offered; $110 daily fee eliminated; contact Harley Hart at harley.hart@mail.wvu.edu for the latest updated price list. 

Cleanroom Facilities'
Higher Education User Rates

Instrument Instrument Type Price per hour unless noted
User Assistance manager assistance $69
Cleanroom Daily Entry Fee cleanroom $8
CVC 610 DC Magnetron Sputtering Station (class 10,000)
sputter deposition
$23
DC & Rf Sputtering Station
(class 10,000)
sputter deposition $23
Neocera Pulsed Laser Deposition
(class 10,000)
pulsed laser deposition $19
KJL E-beam Evaporator
(class, 10,000)
e-beam evaporator $23
Temescal BJD E-Beam Evaporator
(class 10,000)
e-beam evaporator $31
DISCO DAD-3240 Dicing Saw (entry lab) wafer dicer $54
Trion Technology Minilock III Reactive Ion Etching with Inductively Coupled Plasma
(class 10,000)
reactive ion etcher $31
March PX-250 Plasma Asher
(class 1,000)
plasma asher $16
Bruker Dektak Stylus Profilometer
(class 100)
stylus profiler $13
Tencor Alpha-Step 200 stylus profilometer
(class 1,000)
stylus profiler $8
Bruker Contour GT K0 Optical Profiler (class 10,000)
optical profiler
$13
MEIJI MT7000 Metallurgical 
Microscope (class 1,000)
metallurgical microscope $8
Labsmith HVS448 Video Microscope (class 10,000)
video microscope
$8
Labsmith SVM340 Synchronized Video Fluorescent Microscope
(class 10,000)
fluorescent video microscope
$8
JEOL JSM-7600F Scanning Electron Microscope (class 10,000) scanning electron microscope $54
West Bond 7372E6E Epoxy Die Bonder (class 10,000) die bonder $16
West Bond 74776E Gold Wire Bonder (class 10,000) wire bonder $16
Suss Microtech MA6 Mask Aligner
(class 100)
mask aligner - photolithography $31
Suss Microtech MJB3 Mask Aligner 
(class 100)
mask aligner - photolithography $23
OAI UV Flood Exposure
(class 100)
flood exposure - photolithography $16
Developer Hoods (class 10,000) development - photolithography $8
Laurell Technologies 600 Spinner (class 1,000) spinner $8
Laurell Technologies 400 Spinners
(class 100)
spinner $8
Cleanroom Hoods (class 10,000)   wet chemical processing $8
AnnealSys A S-Micro Rapid Thermal Annealer (class 10,000) thermal annealer $16
Thermal Oxidation Furnace
(class 10,000)
thermal annealer   $16

CleanRoom Facilities'
Government or Private Sector User Rates

Instrument Instrument Type Price/Hr (unless otherwise noted)
User Assistance manager assistance $85
Cleanroom Daily Entry Fee   cleanroom   $13
CVC 610 DC Magnetron Sputtering Station (class 10,000)
deposition
$38
DC and Rf Sputtering Station
(class 10,000)
deposition
$38
Neocera Pulsed Laser Deposition (class 10,000)
deposition
$31
KJL E-beam Evaporator   e-beam evaporator $38
Temescal BJD E-Beam Evaporator (class 10,000)
e-beam evaporator $51
DISCO DAD-3240 Dicing Saw (entry lab)
wafer dicer $89
AnnealSys A S-Micro Rapid Thermal Annealer (class 10,000) thermal processing $26
Bruker Contour GT K0 Optical Profiler profiler-optical $21
Trion Technology Minilock III Reactive Ion Etching with Inductively Coupled Plasma
(class 10,000)
reactive ion etcher $31
March PX-250 Plasma Asher 
(class 1,000)
plasma asher $26
Bruker Dektak Stylus Profilometer
(class 100)
stylus profiler $21
Tencor Alpha-Step 200 stylus profilometer (class 10,000)
stylus profiler $13
Bruker Contour GT K0 Optical Profiler optical profiler $21
MEIJI MT7000 Metallurgical 
Microscope (class 1,000)
metallurgical microscope $13
Labsmith HVS448 Video Microscope (class 10,000)
video microscope
$13
Labsmith SVM340 Synchronized Video Fluorescent Microscope
(class 10,000)
fluorescent video microscope
$13
JEOL JSM-7600F Scanning Electron Microscope (class 10,000) scanning electron microscope $65
West Bond 7372E6E Epoxy Die Bonder (class 10,000)
die bonder $26
West Bond 74776E Gold Wire Bonder (class 10,000)
wire bonder $26
Suss Microtech MA6 Mask Aligner (class 100 room)
mask aligner - photolithography
$31
Suss Microtech MJB3 Mask Aligner (class 1,000 room)
mask aligner - photolithography
$31
OAI UV Flood Exposure (class 100)
flood exposure - photolithography $26
Developer Hood development - photolithography $13
Laurel Technologies 400 Spinners (class 100) spinner $13
Laurel Technologies 600 Spinner (class 1,000) spinner $13
Cleanroom Hoods wet chemical processing $13
Lindberg Blue M Tube Oxidation Furnace (class 10,000) thermal processing $26
AnnealSys A S-Micro Rapid Thermal Annealer (class 10,000)
thermal annealer $26
Thermal Oxidation Furnace thermal anealer $26