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CRF Rates

WVU User Rates Higher Education Institution User Rates Government and Private Sector User Rates

Cleanroom Facilities'
WVU User Rates

UPDATE COMING SOON--per-instrument hourly rates now offered; $110 daily fee eliminated; contact Harley Hart at harley.hart@mail.wvu.edu for the latest updated price list. 

Cleanroom Facilities'
Higher Education User Rates

Instrument Instrument Type Price per hour unless noted
User Assistance instrument assistance $43
C and Rf Sputtering Station (class 10,000) deposition $165/day to access all CRF instruments
Neocera Pulsed Laser Deposition
(class 10,000)
deposition $165/day to access all CRF instruments
Temescal BJD E-Beam Evaporator
(class 10,000)
deposition $165/day to access all CRF instruments
CVC 610 DC Magnetron Sputtering Station
(class 10,000)
deposition $165/day to access all CRF instruments
DISCOTECH DAD-3240 Dicing Saw (entry lab) dicing $53
Trion Technology Minilock III Reactive Ion Etching with Inductively Coupled Plasma
(class 10,000)
etching/cleaning $165/day to access all CRF instruments
March PX-250 Plasma Asher
(class 1,000)
etching/cleaning $165/day to access all CRF instruments
Tencor Alpha-Step 200 stylus profilometer
(class 1,000)
inspection/packaging $165/day to access all CRF instruments
MEIJI MT7000 Optical Microscope
(class 1,000)
inspection/packaging $165/day to access all CRF instruments
Olympus BH-2 UMA Optical Microscope
(class 1,000)
inspection/packaging $165/day to access all CRF instruments
JEOL JSM-7600F Scanning Electron Microscope
(class 1,000)
lithography-e-beam $165/day to access all CRF instruments
West Bond 74776E Gold Wire Bonder (class10,000) packaging $165/day to access all CRF instruments
(class 1,000 room) patterning $165/day to access all CRF instruments
Suss Microtech MA6 Mask Aligner
(class 100 room)
patterning $165/day to access all CRF instruments
OAI UV Flood Exposure
(class 100)
patterning $165/day to access all CRF instruments
Bruker Contour GT K0 Optical Profiler profiler-optical $165/day to access all CRF instruments
(class 1,000) spinner $165/day to access all CRF instruments
Laurel Technologies 400 Spinners
(class 100)
spinner $165/day to access all CRF instruments
AnnealSys A S-Micro Rapid Thermal Annealer (class 10,000) thermal processing $165/day to access all CRF instruments
Lindberg Blue M Tube Oxidation Furnace (class 10,000) thermal processing $165/day to access all CRF instruments

CleanRoom Facilities'
Government or Private Sector User Rates

Instrument Instrument Type Price/Hr (unless otherwise noted)
User Assistance Fee instrument assistance $65
AnnealSys A S-Micro Rapid Thermal Annealer (class 10,000) thermal processing $329/day
to access all CRF instruments
Bruker Contour GT K0 Optical Profiler profiler-optical $329/day
to access all CRF instruments
CVC 610 DC Magnetron Sputtering Station (class 10,000) deposition $329/day
to access all CRF instruments
DC and Rf Sputtering Station (class 10,000) deposition $329/day
to access all CRF instruments
DISCOTECH DAD-3240 Dicing Saw (entry lab) dicing $95
to access all CRF instruments
JEOL JSM-7600F Scanning Electron Microscope (class 10,000) lithography-e-beam $329/day
to access all CRF instruments
Laurel Technologies 400 Spinners (class 100) spinner $329/day
to access all CRF instruments
Laurel Technologies 600 Spinner (class 1,000) spinner $329/day
to access all CRF instruments
Lindberg Blue M Tube Oxidation Furnace (class 10,000) thermal processing $329/day
to access all CRF instruments
March PX-250 Plasma Asher (class 1,000) etching/cleaning $329/day
to access all CRF instruments
MEIJI MT7000 Optical Microscope (class 1,000) inspection/packaging $329/day
to access all CRF instruments
Neocera Pulsed Laser Deposition (class 10,000) deposition $329/day
to access all CRF instruments
OAI UV Flood Exposure (class 100) patterning $329/day
to access all CRF instruments
Olympus BH-2 UMA Optical Microscope (class 1,000) inspection/packaging $329/day
to access all CRF instruments
Suss Microtech MA6 Mask Aligner (class 100 room) patterning $329/day
to access all CRF instruments
Suss Microtech MJB3 Mask Aligner (class 1,000 room) patterning $329/day
to access all CRF instruments
Temescal BJD E-Beam Evaporator (class 10,000) deposition $329/day
to access all CRF instruments
Tencor Alpha-Step 200 stylus profilometer (class 10,000) inspection/packaging $329/day
to access all CRF instruments
Thermolyne 6000 Programmable Furnace (class 1,000) thermal processing $329/day
to access all CRF instruments
Trion Technology Minilock III Reactive Ion Etching with Inductively Coupled Plasma (class 10,000) etching/cleaning $329/day
to access all CRF instruments
West Bond 74776E Gold Wire Bonder (class10,000) packaging $329/day
to access all CRF instruments