Facilities Locations

BioNano Research

Downtown Campus:
381 Chemistry Research Laboratory, Prospect St.

Cleanroom

Downtown Campus:
414 White Hall, Willey St.

Major Instruments: 

• Suss MJB3 mask aligner
• Neocera PLD
• KLA Profilometer
• DC/Rf Sputter Station
• DISCO Wafer Dicer

Evansdale Campus:
G75B Engineering Sciences Building, Evansdale Dr.

Major Instruments: 

• Suss MA6 mask aligner
• Bruker Contour XT Profiler
• JEOL SEM
• KJL e-beam evaporator
• Trion ICP-RIE

Electron Microscopy

Evansdale Campus:    Engineering Sciences Building, B64-66 and G57E2, Evansdale Dr.

Major Instruments: 

• JEOL JEM-2100 TEM
• Hitachi S-4700 SEM
• Denton sputter and carbon coater
• Baltec CO2 dryer 
• Allied Technologies polisher
• Leica ultramicrotome

Materials Characterization

Downtown Campus:
White Hall, Willey St.

Major Instruments: 

• Asylum AFM 

381 Chemistry Research Laboratory, Prospect St. 

Major Instruments: 

• Renishaw raman spectroscope

Evansdale Campus:
Engineering Sciences Building, Evansdale Dr., G75C office 

Major Instruments: 

• Bruker Discoverer XRD,
• Physical Electronics XPS
• PANalytical XRD
• J.A Woollam ellipsometer