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Instrumentation List

WVU Rates Higher Education Rates Government and Private Sector Rates SRF Managers

Instrument Mfr/Model Type Description Picture Facilities Contact Campus, Room Location Address
User Assistance
instrument assistance SRF lab managers can train you to use the instruments or run the instruments for you. All Contact the respective lab manager
 Mass Spectrometer Thermofisher Scientific
Q Exactive 
mass spectrometer-quadrupole and orbitrap for direct infusion or liquid chromatography mass spec quadrupole and orbitrap LC-MS/MS--higher performance quadrupole precursor selection with high resolution; accurate-mass Orbitrap detection and UHPLC for high-flow and nano-flow applications; includes HESI and Nanospray flex ion source and Peak N2 generator; Sieve and Proteome Discoverer analytical software BioNano Research Qi Zeng, Ph.D., 304 293-0747 Downtown, CRL 381 381 Prospect St.
High Performance Liquid Chromatography Thermofisher Scientific
 Accela Ultra HPLC
liquid chromatography high resolution and high efficiency separations at reduced analysis times; equipped with a photodiode array detector for absorbance measurments across multiple wavelengths; can be operated as a stand-alone instrument or interfaced to a Q-exactive mass spectrometer Thermofisher Scientific Accela Ultra High Performance Liquid Chromatography BioNano Research Qi Zeng, Ph.D., 304 293-0747 Downtown, CRL 381 381 Prospect St.
High Performance Liquid Chromatography Thermofisher Scientific
 Easy-nano-Ultra 
liquid chromatography nano UHLC using low flow rate and low sample consumption for high sensitivity workflows; fully automated with touch-screen automation; integrated and exchangable columns; interfaces directly to the Q-exactive mass spectrometer via a nano-ESI source ThermoFisher Scientific Easy-nano-Ultra High Performance Liquid Chromatography BioNano Research Qi Zeng, Ph.D., 304 293-0747 Downtown, CRL 381 381 Prospect St.
Spectrofluorometer Horiba Jobin Yvon/Fluorolog-3 
spectrofluorometer steady state wavelength measurements of 230 nm to 1550 nm; lifetime wavelength measurments of 250 nm to 900 nm at 200 psec to 100s of msec; Time-Correlated Single Photon Counting; temperature bath minus 25°C to 150°C; cuvette, thin film, and multiwell plate sample holders BioNano Research Qi Zeng, Ph.D., 304 293-0747 Downtown, CRL 381 381 Prospect St.
Spectropolarimeter JASCO /J-810 
spectropolarimeter Variable wavelength polarimeter and absorption spectrophotometer with peltier temperature control from minus 10°C to 110°C; measuring range of 163 nm to 900 nm; Spectra Manager software BioNano Research Qi Zeng, Ph.D., 304 293-0747 Downtown, CRL 381 381 Prospect St.
Circular Dischroism (CD) Spectropolarimeter JASCO/J-810
spectrometer Equipped with an auto-two-syringe titrator and peltier temperature controller (3-90°C); measurement range of 163 mm to 900 nm; instrument consists of a variable wavelength polarimeter and absorption spectrophotometer Jasco J810 CD Spectropolarimeter BioNano Research Qi Zeng, Ph.D., 304 293-0747 Downtown, CRL 381 381 Prospect St.
Fluorescent Microscope Digital Inverted  AMG EVOS FL 
microscope-fluorescent, inverted GFP, RFP, YFP, and DAPI LED light cubes; 4x, 10x, 20x, 40x, 100x objectives; monochrome camera 1360 x 1025 resolution; 1 DVI and 3 USB ports BioNano Research Qi Zeng, Ph.D., 304 293-0747 Evansdale, ESB G75E 395 Evansdale Dr.
Fluorescent Microscope Inverted with DFC300FX Camera Leica/DMI 6000
microscope-fluorescent, inverted GFP, RFP, YFP, CY5, and DAPI fluorescent filters; DIC, brightfield, and polarizers; 4x, 10x, 20x, 40x, 63x objectives; 1392 x 1024 resolution monochrome camera BioNano Research Qi Zeng, Ph.D., 304 293-0747 Downtown, CRL 381 381 Prospect St.
Fluorescent Microscope Synchronized Video Labsmith/SVM340 
microscope-fluorescent, video synchronous pulsed fluorescence illuminator; 600-line resolution B&W camera module; 10x semi-plan DIN objective BioNano Research Qi Zeng, Ph.D., 304 293-0747 Downtown, CRL 381 381 Prospect St.
 Microscope Video  Labsmith/HVS448
electrophoresis (capillary) system for capillary electrophoresis or microfluidics and MEMS; HVS 448 High voltage sequencer for capillary electrophoresis or microfludic applications; 8 channels; 3.0 kV at 1 kHz sequencing for microfluidics and MEMS BioNano Research Qi Zeng, Ph.D., 304 293-0747 Downtown, CRL 381 381 Prospect St.
Electrophoresis System--IEF (1D) Bio-Rad 1D/2D Protean i12IEF 
electrophoresis system runs 1 to 12 strips in 7, 11, 13, 17, 18, or 24 cm; each channel in the isoelectric focusing tray is independently powered and can run different sample types, pH gradients, and programs independently BioNano Research Qi Zeng, Ph.D., 304 293-0747 Downtown, CRL 381 381 Prospect St.
Electrophoresis System--(SDS-PAGE, 2D) Bio-Rad 1D/2D Protean i12IEF 
electrophoresis system Mini-Protean Tetra Vertical Cell runs 1 to 4 gels, precast at 8.6 cm x 6.8 cm or handcast at 8.3 cm x 7.3 cm; Mini-Protean Tetra Handcast System runs 1.0 mm thick and 10-well gel; Criterion cell runs 1 to 2 gels at 13.3 cm x 8.7 cm; Protean II XL cell runs 1 to 4 handcast gels at 18.5 cm x 20 cm Bio-Rad 1D2D Protean i12IEF Electrophoresis system--(SDS-PAGE,2D) BioNano Research Qi Zeng, Ph.D., 304 293-0747 Downtown, CRL 381 381 Prospect St.
Electrophoresis System--Imager ChemiDoc MP Bio-Rad 1D/2D Protean i12IEF 
electrophoresis system gel or western blot imaging; 4 megapixel image resolution; fluorescent western blotting, chemiluminescence detection, and general gel documentation; installed epi-white light and trans-UV (302 nm), trans-white conversion screen, and epi-red, epi-green & epi-blue LED module; Image LabTM software for gel image acquisition and PDQuest for 2D gel analysis Bio-Rad 1D2D Protean i12IEF Electrophoresis System--Imager ChemiDocMP BioNano Research Qi Zeng, Ph.D., 304 293-0747 Downtown, CRL 381 381 Prospect St.
Electrophoresis System--Western Blot Bio-Rad 1D/2D Protean i12IEF 
electrophoresis system Mini-Protean Tetra Trans-Blot Module and Criterion Blotter BioNano Research Qi Zeng, Ph.D., 304 293-0747 Downtown, CRL 381 381 Prospect St.
Cell Culture Facilities includes temperature controlled storage, biosafety cabinets, refrigeratation, freezers, centrifuges, ultrasonic bath, brightfield microscope, DI water. Heracell CO2 incubators
cell culture facilities brightfield optical microscope with 4x, 10x, 20x objectives; 1°C to 10°C refrigerator; minus 12°C to minus 20°C freezer; minus 86°C freezer; icemaker with IceAssure water filtration; Steris 250 autoclave with 20" x 20" x 38" sterilization chamber BioNano Research Qi Zeng, Ph.D., 304 293-0747 Evansdale, ESB G75E 1306 Evansdale Dr.
Cell Culture Facilities includes temperature controlled storage, biosafety cabinets, refrigeratation, freezers, centrifuges, ultrasonic bath, brightfield microscope, DI water. Heracell CO2 incubators
cell culture facilities brightfield optical microscope with 4x, 10x, 20x objectives; 1°C to 10°C refrigerator; minus 12°C to minus 20°C freezer; minus 86°C freezer; Heidolph Tuttnauer 3850 EP tabletop autoclave with 65L capacity, 15" diameter chamber BioNano Research Qi Zeng, Ph.D., 304 293-0747 Downtown, CRL 381 381 Prospect St.
Autoclave Steris/250 
autoclave Steris 250 autoclave with 20" x 20" x 38" sterilization chamber Steris 250 Autoclave BioNano Research Qi Zeng, Ph.D., 304 293-0747 Evansdale, ESB G75E 1306 Evansdale Dr.
Speedvac Thermo Scientific
speedvac Savant SPD 111 P1 with standard evaporation concentrator for acetonitrile, ethanol, isopropanol, methanol, and water Thermo Scientific Speedvac BioNano Research Qi Zeng, Ph.D., 304 293-0747 Downtown, CRL 381 381 Prospect St.
Centrifuge Thermofisher SORVALL Legend XR1 
centrifuge General purpose refrigerated centrifuges; Temperature control MINUS 10°C to 40°C; TX-400 swinging bucket rotors (max speed 5000 rpm); 16×50mL or 36×15mL conical tube capacity; Fiberlite 15 fixed angle rotor (max speed 15,000rpm); 6×85mL round bottom or 6×50mL conical tubes Thermofisher SORVALL Legend X1R Centrifuge BioNano Research Qi Zeng, Ph.D., 304 293-0747 Downtown, CRL 381 381 Prospect St.
Centrifuge Thermofisher SORVALL Legend XR1 
centrifuge General purpose refrigerated centrifuges; Temperature control MINUS 10°C to 40°C; TX-400 swinging bucket rotors (max speed 5000 rpm); 16×50mL or 36×15mL conical tube capacity; Fiberlite 15 fixed angle rotor (max speed 15,000rpm); 6×85mL round bottom or 6×50mL conical tubes this rotor only available at ESB Thermofisher SORVALL Legend X1R Centrifuge BioNano Research Qi Zeng Ph.D., 304 293-0747 Evansdale, ESB G75E 1306 Evansdale Dr.
 Transmission Electron Microscope JEOL/JEM-2100
microscope-transmission electron images materials, nanoelectronics, and biologicals; Gatan ES500W digital camera allows high speed, high quality imaging with a field-of-view larger than traditional TEM; images intense electron diffraction patterns without the 'blooming' artifact; SC1000 Orius CCD digital camera provides large format (11 megapixel), retractable, fiber-optic-coupled CCD camera with > 14 frames per second for high resolution; 3 independent condenser lenses with the highest probe current for any given probe size allows analytic and diffraction capabilities; JEOL Alpha SelectorTM allows full convergent beam to parallel illumination; Lorentz microscopy standard; high contrast aperture available for any choice pole-piece allowing high contrast imaging and simultaneous EDS Electron Microscopy Marcela Redigolo, Ph.D., 304 293-9683 Evansdale, ESB B63 1306 
Evansdale Dr.
Scanning Electron Microscope Hitachi/S-4700 
microscope-scanning electron offers PC control with a novel electron optical column to give exceptional performance for large and small specimens; ultra high resolution with optimized analytic functionality including EDS mapping Electron Microscopy Marcela Redigolo, Ph.D., 304 293-9683 Evansdale, ESB B66 1306 Evansdale Dr.
TEM Ion Mill Fischione 1050 
sample prep-electron microscope programmable, automatic operation; 2 independently adjustable,TrueFocus ion sources; vacuum load lock for rapid specimen exchange; high energy operation for rapid milling; low energy operation for specimen polishing; adjustable milling angle range ±10°; specimen rocking or rotation; liquid N2-cooled specimen stage; thinning to electron transparency Electron Microscopy Marcela Redigolo, Ph.D., 304 293-9683 Evansdale, ESB B64 1306 Evansdale Dr.
Sputter and Carbon Coater Denton Desk V 
deposition-electron microscope for the removal of charge build-up during imaging; high vacuum coater for cleaner, lower oxygen deposition of higher conductivity metals (Au-Pd) onto SEM samples; planetary motion sample stage for more uniform and better conformal coverage; manual and automated modes with pre-programmed settings for repeatability Electron Microscopy Marcela Redigolo, Ph.D., 304 293-9683 Evansdale, ESB B64 1306 Evansdale Dr.
Polishing System Allied High Tech Multiprep Precision 
electron microscope-sample prep enables precise semi-automatic sample prep of a wide range of materials for microscopic evaluation; 12-in. platen and scaled positioning device with high torque rotation/oscillation motors for samples up to 1600 mm2; parallel, angle, and site-specific polishing or any combination thereof; dual pitch and roll micrometers allow precise sample tilt relative to the abrasive plane; rigid Z-indexing spindle maintains pre-defined geometric orientation throughout grinding/polishing; digital indicators quantify material remove for in-person real-time or pre-set unattended operation; variable speed rotation and oscillation minimizes artifacts; adjustable load control allows for small, delicate samples to large samples; parallel circuit delayering, cross-sectioning, serial/3D preparation, and wedge polishing applications; eliminates inconsistencies between users regardless of skill Electron Microscopy Marcela Redigolo, Ph.D., 304 293-9683 Evansdale, ESB B64 1306 Evansdale Dr.
Saw  Allied High Tech Low Speed Tech4
sample prep-electron microscope cuts small, delicate samples that cannot tolerate excessive friction; 3-in. to 6-in. blade range can section up to 2-in. thick samples; gravity-fed cutting system; rotating blade applies cutting fluid to the sample Electron Microscopy Marcela Redigolo, Ph.D., 304 293-9683 Evansdale, ESB B64 1306 Evansdale Dr.
CO2 Critical Point Dryer  Baltec CPD30
electron microscope-sample prep Supercritical Autosamdri®-815, series B allows complete automatic anti-stiction processing of 10 mm square die and 1” wafers; ideal for biological samples or releasing MEMS devices; internal surfaces inert to CO2, ultra pure alcohols and acetone; easily repeatable operating parameters; different sample holders make the instrument highly adaptable BAL-TEC Critical Point Dryer Image Electron Microscopy Marcela Redigolo, Ph.D., 304 293-9683 Evansdale, ESB B64 1306 Evansdale Dr.
Ultramicrotome  Leica UC7 RT
electron microscope-sample prep for biosample prep for electron microscopy; 3 independent, controllable LEDs and LED spotlights for outstanding illumination; fully motorized knife stages; produce section thicknesses between 20 nm and 2.5 µm at temperatures down to minus 185°C Electron Microscopy Marcela Redigolo, Ph.D., 304 293-9683 Evansdale, ESB B64 1306 Evansdale Dr.
Microscope Zeiss Axio Lab.A1 
electron microscope-sample prep 5x, 10x, 20x, 40x, 100x oil objectives; 10X for 20 mm field-of-view 20 eyepiece Electron Microscopy Marcela Redigolo, Ph.D., 304 293-9683 Evansdale, ESB B64 1306
Evansdale Dr.
TEM/SEM
BioSample Prep 

electron microscope-sample prep for preparing biosamples for electron microscopy studies; samples can be prefixed, fixed, postfixed, stained and ultramicrotomed; weekly price includes access to all electron microscope-sample prep instruments Electron Microscopy Marcela Redigolo, Ph.D., 304 293-9683 Evansdale, ESB G75E2 1306 Evansdale Dr.
X-ray Diffractometer  Bruker D8 Discovery 
X-ray diffractometer for determining crystal structure of powders, pellets, thin films, or bulk materials; reciprocal space mapping of crystalline materials and 2D mapping of wafers; Cu-kα1 8047.2 eV source; 45 kV and 40 mA max. X-ray power; 0° < 2Ɵ < 110° angular range; spinning, universal, and clip-on sample stages; automatic sample loader for up to 45 samples; Highscore Plus analysis software with PDF 3 database Bruker D8 Discovery XRD Materials Characterization Qiang Wang, Ph.D., 304 293-9683 Evansdale, ERB 211 1306 Evansdale Dr.
X-ray Diffractometer  PANalytical X’Pert Pro 
X-ray diffractometer for identifying single-phase materials and multi-phase mixtures for powders, thin films, and bulk materials; quantitative determination of amounts of different phases in multi-phase mixtures; Cu-kα1 8047.2 eV source; 50 kV and 50 mA max. X-ray power with 1 mm slit size; 360° angular range with 100° < 2Ɵ < 169° max. user range; 1-in. hot stage from ambient to 900°C; 1-in. sample clip stage; 5-in. vacuum stage PANalytical xrd Materials Characterization Qiang Wang, Ph.D., 304 293-9683 Evansdale, ESB B61D 1306 Evansdale Dr.
X-ray Diffractometer  Rigaku RU-300 
X-ray diffractometer for identifying crystal structure of thin films or bulk materials; reciprocal space mapping of crystalline materials and 2D mapping of wafers; Cu-kα1 8041 eV source; 2 mm high angle slit size and 1 mm low angle slit size; 0° < 2Ɵ < 92° high angle range and 0° < 2Ɵ < 0.10° low angle range; 50 kV and 150 mA max. X-ray power for high angle and 50 kV and 240 mA for low angle; rotating anode; 2 cm x 2 cm sample stage Rigaku xrd Materials Characterization Qiang Wang, Ph.D., 304 293-9683 downtown, WH 402 135 Willey St.
X-Ray Photoelectron Spectroscope   Physical Electronics PHI 5000 VersaProbe 
X-ray photo electron spectroscope for determining micro-area element composition and chemical state at the surface of powders and thin films; depth profile analysis of structures and interfaces; Al, Mg, and focused Al X-ray sources and He UV source; spectral range of 0 to 1400 eV binding energy; 0.50 eV energy resolution; up to 50 mm diameter sample size Materials Characterization Qiang Wang, Ph.D., 304 293-9683 Evansdale, ESB B62 1306 Evansdale Dr.
Raman Microscope Renishaw InVia 
Raman microscope for determining chemical composition, molecular structure, and molecular interactions and conducting quantitative analysis of material chemical compositions; < 1 µm lateral spatial resolution; 409 nm, 532 nm, and 785 nm excitation wavelengths at 100 mW max. power; max. sample size of 9 mm x 15 mm x 8 mm thick Ramans Materials Characterization Qiang Wang, Ph.D., 304 293-9683 downtown, WH B20B 135 Willey St.
 Fourier Transform Infra-Red (FTIR) Spectrometer Digilab FTS 7000/UMA 600
spectrometer-FTIR for analyzing chemical composition of micro/macro samples and qualitatively identifying molecules and functional groups; 25,000 to 50 cm-1 mid-IR-to-near-IR source spectrum wavenumbers; 10,000 to 150 cm -1 wavenumber detection range; variable angle, Ge ATR, diamond ATR, and photo-acoustic bench accessories; UA 600 infrared microscope with MCT and Stingray MCT array detectors DigiLab UMA 600 FTIR Materials Characterization Qiang Wang, Ph.D., 304 293-9683 Evansdale, ERB 211 1306 Evansdale Dr.
Ellipsometer White Light  J.A. Woollam M-2000U 
ellipsometer for characterizing film thickness with Angstrom accuracy and determining optical constant of materials; 245 to 1,000 nm (470 wavelengths) spectrum range; 45° to 90° angle of incidence manual angular stage; stage mapping for thin film uniformity; multiple layer roughness modeling; focusing lens attachment for measuring micron thin films; samples up to 300 mm diameter and 20 mm thickness J.A. Woolam EC-400 White Ellipsometer Materials Characterization Qiang Wang, Ph.D., 304 293-9683 Evansdale, ERB 211 1306 Evansdale Dr.
Atomic Force Microscope Nanoscope MultiMode Scanning Probe 
microscope-atomic force for obtaining 3D surface topography at sub-nanometer resolution; contact and friction force measurement between surfaces in contact; sample conductivity and magnetic property measurements in nano-scale region; 125 µm x 125 µm max. scan range; samples up to 15 mm diameter and 5 mm thickness Nanoscope AFM Materials Characterization Qiang Wang, Ph.D., 304 293-9683 downtown, WH B20B 135 Willey St.
 Atomic Force Microscope Asylum MFP-3D
microscope-atomic force for obtaining 3D surface topography at sub-nanometer resolution; contact and friction force measurement between surfaces in contact; sample conductivity and magnetic property measurements in nano-scale region; samples up to 80 mm diameter Asylum AFM Materials Characterization Qiang Wang, Ph.D., 304 293-9683 downtown, WH B20B 135 Willey St.
Spinning Disk Confocal Fluorescent Microscope Olympus 
microscope--confocal fluorescent DSU spinning disc confocal system; DAPI, FTIC, CY3, and U/B/G fluorescence filter cubes; CCD camera for high speed imaging and video recording; 4x, 20x, 40x, and 100x objectives; motorized stage for 3D confocal imaging Materials Characterization Qiang Wang, Ph.D., 304 293-9683 downtown, WH B20B 135 Willey St.
Optical Profiler Bruker Contour GT K0 
profiler-optical synchronous pulsed fluorescence illuminator; 5x, 10x, and 50x objectives with 2x field-of-view multiplier; 5x Through Transmissive Media objective; motorized staging for data stitching Cleanroom Qiang Wang, Ph.D., 304 293-9683 Evansdale, ESB G75B 1306 Evansdale Dr.
 Mask Aligner (class 1,000 room) Suss Microtech MJB3
patterning front side or back side alignment; 365 nm UV exposure source; contact, vacuum contact, or proximity modes; 10 mm x 10 mm die to 3-in. diameter wafer sample size; masks with 2- to 4-in. diameter pattern area SUSS MJB3 Mask Aligner Cleanroom Harley Hart, 304 293-5847 downtown, WH 414 135 Willey St.
Spinner (class 1,000) Laurel Technologies 600
spinner 4-ft. spinner hood with hotplates available; substrates from 10 mm to 6 in.; 12,000 rpm maximum speed Cleanroom Harley Hart, 304 293-5847 downtown, WH 414 135 Willey St.
Sputtering Station DC and Rf (class 10,000)
deposition five 2-inch targets; standard 2-inch targets include Al, Cu, Au, Pt, Ti, Ta, Ni, ZnO, Co; rotating substrate holder with 4-in. max. sample size; loadlock system for high throughput; SRS RGA 100; Ar and O2 source gases; 850°C max. temperature back side substrate heater Cleanroom Harley Hart, 304 293-5847 downtown, WH 414 135 Willey St.
Pulsed Laser Deposition (class 10,000) Neocera 
deposition computer controlled UHV system with loadlock for high throughput; laser MBE system with RHEED setup; configured with PLD-continuous composition spread; Pulsed Electron Deposition source can be installed upon request; up to 6 1-in. targets or 3 2-in. targets, provided by the user and approved by SRF; rotating substrate holder with 2-in. max. sample size; Ar and O2 source gases; up to 1050°C back side substrate heater; 2 2-in. sputtering guns Neocera PLD Cleanroom Harley Hart, 304 293-5847 downtown, WH 414 135 Willey St.
profilometer (class 10,000) Tencor Alpha-Step 200 stylus 
inspection/packaging non-destructive height measurements, +/-160 µm range, 10 µm horizontal scan range, hard or soft films Cleanroom Harley Hart, 304 293-5847 downtown, WH 414 135 Willey St.
Optical Microscope (class 1,000) MEIJI MT7000 
inspection/packaging 5x, 10x, 20x, 50x, 100x objectives with 10x eyepiece; brightfield observation mode with polarizers; CC2100 digital camera with computer Infinity Capture and Analyze software for image capture and photomicrogrpahy MEIJI Microscope Image Cleanroom Harley Hart, 304 293-5847 downtown, WH 414 135 Willey St.
Dicing Saw DISCOTECH DAD-3240
dicing autoalignment function for improved precision; 0.0001 mm minimum indexing step in X and Y directions; 6-inch max. sample size; standard dicing blades for silicon and sapphire substrates; hub and hubless style blades available; ceramic and vacuum style chucks available Discotech DAD3240 Wafer Dicer Image Cleanroom Harley Hart, 304 293-5847 downtown, WH 414 135 Willey St.
Mask Aligner (class 100 room) Suss Microtech MA6 
patterning front side or back side alignment; 320 nm UV exposure source; contact, vacuum contact, or proximity modes; 10 mm x 10 mm die to 4-in. diameter wafer sample size; masks with 2- to 4-in. diameter pattern area SUSS MA6 Mask Aligner Cleanroom Harley Hart, 304 293-5847 Evansdale, ESB G75B 1306 Evansdale Dr.
Spinners (class 100) Laurel Technologies 400 
spinner 4-ft. spinner hood with hotplates available; substrates from 10 mm to 6 in.; 8,000 rpm maximum speed Laurel 400 Spinners Cleanroom Harley Hart, 304 293-5847 Evansdale, ESB G75B 1306 Evansdale Dr.
Flood Exposure (class 100) OAI UV
patterning 365 nm UV exposure source; 5-in. diameter exposure area OAI Flood Exposure Cleanroom Harley Hart, 304 293-5847 Evansdale, ESB G75B 1306 Evansdale Dr.
Scanning Electron Microscope (class 10,000) JEOL JSM-7600F 
lithography-e-beam field emission SEM with e-beam lithography capability; accelerating voltage of 0.1 to 30 kV; magnification range from 25 to 1,000,000; up to 4-inch diameter sample size JEOL SEM image Cleanroom Harley Hart, 304 293-5847 Evansdale, ESB G75B 1306 Evansdale Dr.
E-Beam Evaporator (class 10,000) Temescal BJD 
deposition standard materials include Al, Cr, Co, Au, Ni, Pt, Ti, Al2O3, SiO2; 6-pocket single beam source; in-situ crystal deposition monitor; standard planetary holds up to 13 substrates with up to 3-in. diameter; variable-angle planetary holds 1 3-in. diameter wafer and can be used for glancing-angle deposition; O2 ion source; substrate heater Temescal Ebeam Evaporator Cleanroom Harley Hart, 304 293-5847 Evansdale, ESB G75B 1306 Evansdale Dr.
Sputtering Station (class 10,000) CVC 610 DC Magnetron 
deposition for deposition of metal thin films; 8-in. Ti target; 8-in. Al target upon request; 2-in. interchangeable targets with 3-in. area max. surface covereage; standard 2-in. Al, Cr, Cu, Au, Pt, Ti, and Ta targets; holds up to 6 substrates with up to 6-in. diameter each; Ar source gas; capable of N2-assisted Ar deposition for reactive sputtering; ion cleaning source; back side substrate heater CVC Sputtering Station Cleanroom Harley Hart, 304 293-5847 Evansdale, ESB G75B 1306 Evansdale Dr.
 Reactive Ion Etching with Inductively Coupled Plasma (class 10,000) Trion Technology Minilock III
etching/cleaning for plasma etching of semiconductors, insulators, metals, and polymers; anisotropic and isotropic plasma etching; 3-in. max. substrate size; 600 W RIE power supply and 1000W ICP power supply; Cl2, BCl3, CF4, O2 and Ar etch gases Trion ICP RIE Cleanroom Harley Hart, 304 293-5847 Evansdale, ESB G75B 1306 Evansdale Dr.
Plasma Asher (class 1,000) March PX-250 
etching/cleaning for cleaning substrates with oxygen plasma; 8 in. x 8 in. shelf can accommodate a variety of substrate sizes; 300 W max. RF power March Oxygen Plasma Asher Cleanroom Harley Hart, 304 293-5847 Evansdale, ESB G75B 1306 Evansdale Dr.
 Annealer (class 10,000) AnnealSys A S-Micro Rapid Thermal
thermal processing for rapidly heating and cooling samples; 12,500°C max. temperature; variable ramp rate of 0.1 to 3,000°C per second; N2 and Ar environment; vacuum; 2-in. diameter max. sample size Annealysys Rapid Thermal Annealer img Cleanroom Harley Hart, 304 293-5847 Evansdale, ESB G75B 1306 Evansdale Dr.
Oxidation Furnace (class 10,000) Lindberg Blue M Tube 
thermal processing for SiO2 and TiO growth; 3-in. diameter wafers; 1,200°C max. temperature Cleanroom Harley Hart, 304 293-5847 Evansdale, ESB G75B 1306 Evansdale Dr.
Programmable Furnace (class 1,000) Thermolyne 6000 
thermal processing 12.75" W x 6.75" H x 10" D chamber; 1.200°C max. temperature; 100°C per minute ramp rate; N2 purge Cleanroom Harley Hart, 304 293-5847 Evansdale, ESB G75B 1306 Evansdale Dr.
Optical Microscope (class 1,000) Olympus BH-2 UMA 
inspection/packaging for visual examination of features; 1.5x, 5x, 10x, 20x, 50x objectives with 10x eyepiece; bright field/dark field with polarizers and Nomarski prisms; reflective and transmissive; Canon PowerShot digital camera for image capture Olympus Microscope Cleanroom Harley Hart, 304 293-5847 Evansdale, ESB G75B 1306 Evansdale Dr.
Gold Wire Bonder (class 10,000) West Bond 74776E 
packaging for making gold wire connections between device and package; ball-wedge bonding, deep-access ball-wedge bonding, and wedge-wedge bonding; packages of any shape up to 2-in. square West Bond Wire Bonder Cleanroom Harley Hart, 304 293-5847 Evansdale, ESB G75B 1306 Evansdale Dr.

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BioNano Manager:
Qi Zeng
, Ph.D. | (304) 293-0747
Materials Characterization Manager:
Qiang Wang , Ph.D. | (304) 293-9683
Electron Microscopy Manager:
Marcela Redigolo
, Ph.D. | (304) 293-9683
Cleanroom Manager:
Harley Hart
| (304) 293-5847