Equipment
Shared Research Facilities Equipment is organized in four separate facilities:
- Cleanroom Facility
- Materials Fabrication and Characterization Facilities
- Bio-Nano Research Facility
- Electron Microscopy Facility
The panels below list the equipment in each facility. For more information, click the 'more information' tab in the panel, or the facility name in the list above. For convenience, a list of equipment by function and equipment by staff responsibility is also available.
- Cleanroom
- Electron Microscopy
- Mat'l Fabrication/Characterization
- Bio-Nano
The cleanroom, located in the Engineering Sciences Building, is the key laboratory for fabricating electrical and photonic devices. This suite of labs consists of 2,100 square feet of clean space and accompanying support spaces. The clean spaces include class 100, class 1,000 and two class 10,000 rooms. The facility is capable of photo- and e-beam lithography, wet chemical processing, metallization and deposition, reactive ion etching, and thermal processing.
All equipment is located in the cleanroom, G75 Engineering Sciences Building.
Fabrication
- CVC 610 DC Magnetron Sputtering Station
- TEMESCAL BJD 2000 E-Beam Evaporator
- Oxford Plasmalab 80+ PECVD
- Suss Microtec MA6 Mask Aligner
- OAI UV Flood Exposure System
- (2) Laurell Technologies 400 Spinners
Processing
- Trion Technology Minilock III Reactive Ion Etching (RIE) with ICP (Inductively Coupled Plasma)
- March PX-250 Plasma Asher - G75 ESB
- AnnealSys AS-Micro Rapid Thermal Annealer
- Thermolyne 6000 Programmable Furnace
- (2) Lindberg Blue M Furnaces
- West Bond 7372E Epoxy Die Bonder
- West Bond 74776E Gold Wire Bonder
- Tencor Alpha-Step 200 Profilometer
- Olympus BH-2 UMA Optical Microscope
The Electron Microscopy Facility is located in the Engineering Sciences Building (ESB). Its laboratories are fundamental for structural analyses of different nanostructures, going from bulk samples to biological. Tools include:
- JEOL JSM-7600F Scanning Electron Microscope - G75 ESB (in the cleanroom)
- JEOL JEM-2100 Transmission Electron Microscope - B63 ESB
- Allied High Tech Mulitprep Precision Polishing System - B64 ESB
- Allied High Tech Low Speed Saw Tech4 - B64 ESB
Materials characterization techniques include x-ray diffraction, chemical analyses such as X-Ray Photoelectron Spectroscopy, and Optical techniques. Equipment is located in the Engineering Research Building (ERB), White Hall (WH), Hodges Hall (HH), and the Engineering Science Building (ESB).
- CVP RF and DC Magnetron Sputtering Station - WH 410A
- Pulsed Laser Deposition Coming F2011-S2012 - WH 410A
- Bruker D8 Discovery - 211 ERB
- Rigaku RU-300 - WH 402
- Physical Electronics PHI 5000 VersaProbe X-Ray Photoelectron Spectroscopy- B62 ESB
- Renishaw InVia Raman Microscope - 325 HH
- Digilab FTS 7000 System Fourier Transform Infra-Red (FTIR) Spectrometer - 211 ERB
- J.A. Woollam M-2000U White Light Ellipsometer - 211 ERB
- Leitz Ergolux Optical Microscope - B07 Hodges Hall
- VEECO MultiMode Scanning Probe Microscope - WH B-20B
- Balzers Critical Point CO2 Dryer- B07 Hodges Hall
- Quantum Design PPMS Coming S2012
The new Bio-Nano Research Facility includes laboratories on the Evansdale (G75E Engineering Sciences Building) and Downtown (381 Chemistry Research Laboratories) campuses. The equipment listed is ready for use.
- Heracell 150i CO2 Incubators for Mammalian Cell Growth
- 2 units G75E Engineering Sciences Building
- 2 units 381 Chemistry Research Laboratory
- Sorvall Legend X1R (refrigerated) General Purpose Centrifuges
- 1 G75E Engineering Sciences Building
- 1 381 Chemistry Research Laboratories
- Sorvall Legend 17R (refrigerated) Microcentrifuges
- 1 G75E Engineering Sciences Building
- 1 381 Chemistry Research Laboratories
- Fisher scientific micromaster inverted microscope - G75E ESB
- Labsmith SVM340 Synchronized video microscope - G75E ESB
- Thermo Scientific Revco plus ultra-low temperature HD Freezer - 381 CRL
- Scotsman Flake Ice Maker - G75E ESB
- Steris LAB250 Autoclave - G75E ESB
