Descriptions of the Shared Research Facilities – instrumentation and services – for use in grant applications are available below. You can copy and paste the content needed into the appropriate section of your grant.
WVU Shared Research Facilities is available on a fee-per-use basis. The facilities include two cleanrooms, a variety of characterization equipments, electron microscopy instrumentation and bionano research laboratories. Access and training are reserved using a scheduling software. There are four full time managers, available for laboratories administration and maintenance, training and user assistance. The facilities are located in several buildings on the Evansdale and Downtown campuses at WVU, and they are supported in part by the National Science Foundation EPSCoR Research Infrastructure Improvement Cooperative Agreement #1003907, the state of West Virginia (WVEPSCoR via the Higher Education Policy Commission) and the West Virginia University. The remaining support is generated through user fees.
The WVU SRF Cleanrooms are available on a fee for use basis. The primary cleanroom is a 4,000 sq. ft. suite of four rooms in the engineering complex. The suite rooms range from class 100 to class 10,000. Users are charged for use of the facilities on a daily or monthly basis. This cleanroom has photolithography and e-beam lithography capabilities, a class 1,000 wet processing room, a sputtering station with ion mill, an e-beam evaporator, an oxidation furnace, a PECVD, a reactive ion etching tool with ICP, and thermal processing tools, which includes rapid thermal annealing. Inspection tools include a scanning electron microscopy, an optical microscope and a stylus profilometer. The cleanroom also includes a dicing saw and wire bonder for packaging. A secondary cleanroom is located on the downtown campus in White Hall. It consists of class 1,000, and class 10, 000 rooms. Users are charged a per day, per instrument fee. This cleanroom has photolithography capabilities, sputtering, RF sputtering, pulsed laser deposition, and a computer controlled wafer dicer. One full time staff member provides training and support on the equipment and processes. Training is provided free of charge.