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CRF User Resources

SRF Cleanroom Facilities (ESB & White Hall)

General Laboratory Tips

Inspection and Packaging

DISCOTECH Wafer Dicer

Optical Microscopy

Stylus Profilometer

Wire Bonder

Material Deposition and Growth

E-Beam Evaporator (Temescal)

E-Beam Evaporator (Kurt J. Lesker Lab 18)

PECVD

Pulsed Laser Deposition

Sputtering Station

Thermal Oxidation Furnace

Photolithography and E-Beam Lithography

E-Beam Lithography

Spinners

Mask Aligners

UV Flood Exposure System

AZ Products

SU-8 Products

Plasma Etching and Cleaning

ICP Enhanced RIE

Oxygen Plasma Asher

Thermal Processing

Programmable Furnace

Rapid Thermal Annealer

Wet Processing

Vacuum Systems