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CRF Training

request training

To request Cleanroom Protocol Training, send an email to Mr. Harley Hart with the subject heading, "Request Training." Prerequisites: the completed User Agreement and  General Laboratory and Chemical Safety Training.

To request training on a specific instrument, send an email to Mr. Harley Hart with the subject heading, "Request Training." Prerequisites: the completed User Agreement, General Laboratory and Chemical Safety Training, and Cleanroom Protocol Training.

Cleanroom Protocol

Required before you will permitted to enter the SRF Cleanrooms.

Cleanrooms require special precautions to minimize the dirt and dust contamination that is brought into the labs with users. You must complete this training before being permitted to enter the SRF Cleanrooms.

Cleanroom Training Materials

Cleanroom Procedures

This training is pre-requisite for all instruments in the SRF Cleanrooms. You will not be admitted to the Cleanrooms until completing this training.

This training takes approximately 1 hour.

Responsible Staff Member: Harley Hart

Photolithography

Required before using the spinners, photomask aligners or flood exposure source

An overview of photoresist chemistry, as well as responsible use of UV light and photoresist. Users are presented with a typical AZ or SU-8 positive resist process flow. Instruction on proper use of the photoresist spinners and MA6 Aligner or MJB3 Aligner is given through demonstration.

Photolithography User Resources

CVC Sputter Deposition or White Hall Sputter Station

A presentation of sputter deposition theory and overview of the CVC sputtering system in ESB or White Hall Sputter Station. This will be followed by a demonstration using the desired sputter deposition instrument.

This training takes about 2.5 hours.

Sputter Station User Resources

Reactive Ion Etch and Plasma-Enhanced Chemical Vapor Deposition

A presentation of basic plasma physics and its uses in reactive ion etching chemistry and plasma enhanced chemical vapor deposition. This is followed by a demonstration on the Trion ICP system.

This training takes about 2 hours.

An additional demonstration is required for use on the PECVD or the Oxford RIE system.

PECVD User Resources

E-beam Evaporator

A presentation on evaporation and an overview of the Temescal Evaporator of Kurt J. Lesker Lab 18 instrument. The presentation will be followed by a demonstration on the desired E-beam Evaporator in the ESB cleanroom.

This training takes about 2.5 hours.

E-Beam Evaporator User Resources

Safety