Our facilities house two cleanrooms on two different campuses.
G75B Engineering Sciences Building Cleanroom is the key laboratory for fabricating electrical and photonic devices. This suite of labs consists of 2,100 square feet of clean space and accompanying support spaces. The clean spaces include class 100, class 1,000 and two class 10,000 rooms. The facility is capable of photo- and e-beam lithography, wet chemical processing, metallization and deposition, reactive ion etching, thermal processing and sample packaging.
414 White Hall is the cleanroom facilities located in White Hall consists of one class 1,000 room and one class 10,000 room. This suite of labs consists of 1160 square feet of clean space and accompanying support spaces. This facility is capable of photolithography, deposition, MBE, and wafer dicing.
Photo Credit: Anand Kadiyala