Cleanroom

Our facilities house two cleanrooms on two different campuses.

Cleanroom in G75B Engineering Sciences Building is the key laboratory for fabricating electrical and photonic devices. This suite of labs consists of 2,100 square feet of clean space and accompanying support areas. The clean spaces include class-100, class-1,000 and two class-10,000 rooms. These facilities are capable of photo- and e-beam lithography, wet chemical processing, metallization and deposition, reactive ion etching, thermal processing and sample packaging.

Cleanroom in 414 White Hall consists of one class-1,000 room and one class-10,000 room. This suite of labs consists of 1160 square feet of clean space and accompanying support areas. These facilities are capable of photolithography, deposition, MBE, and wafer dicing.

Facilities Manager

Harley Hart

Panoramic Photo of SRF Cleanroom Facilities in Evansdale campus

Panoramic photo of SRF Cleanroom Facilities

Photo Credit: Anand Kadiyala