Standard Operating Procedure Documents

 

Bio-Nano Research Facility

 

Cleanroom

  • AutoSamdri CO2 Dryer(located in ESB) Manual
  • E-Beam Evaporator (Temescal) SOP
  • Flood Exposure (OAI) SOP Troubleshooting Guide
  • Reactive Ion Etcher (RIE) with ICP (Trion Minilock III) SOP Troubleshooting Guide
  • Mask Aligner (Karl Suss)SOP Troubleshooting Guide
  • PECVD (Oxford) SOP Troubleshooting Guide
  • Plasma Asher (March PX-250) SOP
  • Programmable Furnace (Thermolyne 6000) SOP
  • Rapid Thermal Processor (As-Micro) SOP
  • Spinners (Laurell) SOP Troubleshooting Guide
  • Sputter Station (CVC610) SOP
  • Stylus Profiler (Tencor Alphastep 200) SOP Troubleshooting Guide Manual
  • Wire Bonder (West Bond) SOP

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    Electron Microscopy

  • Scanning Electron Microscope (JEOL JSM 7600F) SOP Troubleshooting Guide
  • EDX (Oxford Inca) SOP Troubleshooting Guide
  • E-Beam lithography (NPGS) SOP
  • Transmission Electron Microscope (JEOL 2100 TEM) SOP
  • MultiPrep Polishing System (Allied High Tech) - Calibration SOP
  • MultiPrep Polishing System (Allied High Tech) - Material Removal SOP

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    Materials Fabrication and Characterization Facility

  • Atomic Force Microscope (Veeco Multimode AFM/SPM) SOP    
  • CO2 Critical Point Dryer (Bal-tec CPD 030) SOP
  • Fourier Transfor Infrared Spectrometer (Digilab FTS7000 FTIR) SOP
  • Magnetron Sputtering System (CVP RF/DC )
  • Raman Spectroscopy (Renishaw InVia) SOP
  • Spectroscopic Ellipsometer (J.A. Woollam M-2000U) SOP
  • X-ray Diffractometer (Bruker D8 Discovery) SOP
  • X-ray Diffractometer (Rigaku RU-300)
  • X-ray Photoelectron Spectrometer (PHI 5000 VersaProbe XPS) SOP

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    More to come